Name | Tris(dimethylamino)silane |
Synonyms | BRN 1901643 tris(dimethylamino)silyl Tris(dimethylamino)silane TRIS(DIMETHYLAMINO)SILANE N,N',N''-Silanetriyltris(dimethylamine) N,N',N''-(Silanetriyl)tris(dimethylamine) n,n,n',n',n'',n''-hexamethylsilanetriamine n,n,n',n',n'',n''-hexamethyl-silanetriamin N,N,N',N',N'',N''-Hexamethylsilanetriamine N,N,N',N',N'',N''-hexamethyl-Silanetriamine Silanetriamine, N,N,N',N',N'',N''-hexamethyl- |
CAS | 15112-89-7 |
EINECS | 239-165-0 |
InChI | InChI=1/C6H18N3Si/c1-7(2)10(8(3)4)9(5)6/h1-6H3 |
Molecular Formula | C6H19N3Si |
Molar Mass | 161.32 |
Density | 0,838 g/cm3 |
Boling Point | 145 °C |
Flash Point | 25°C |
Appearance | liquid |
Specific Gravity | 0.84 |
Color | colorless to light yellow |
pKa | 10.93±0.70(Predicted) |
Storage Condition | Room Temprature |
Sensitive | 8: reacts rapidly with moisture, water, protic solvents |
Refractive Index | 1.4247 |
Risk Codes | R10 - Flammable R36/37/38 - Irritating to eyes, respiratory system and skin. R52/53 - Harmful to aquatic organisms, may cause long-term adverse effects in the aquatic environment. R34 - Causes burns R29 - Contact with water liberates toxic gas R20 - Harmful by inhalation R15 - Contact with water liberates extremely flammable gases R11 - Highly Flammable |
Safety Description | S16 - Keep away from sources of ignition. S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S36/37/39 - Wear suitable protective clothing, gloves and eye/face protection. S45 - In case of accident or if you feel unwell, seek medical advice immediately (show the label whenever possible.) S43 - In case of fire use ... (there follows the type of fire-fighting equipment to be used.) |
UN IDs | 1993 |
WGK Germany | 3 |
RTECS | VV5800000 |
TSCA | Yes |
EPA chemical information | Information provided by: ofmpub.epa.gov (external link) |
product characteristics | related studies show that tris (dimethylamino) silane as a precursor source not only has better stability and higher vapor pressure, but also shows quite high reactivity, so this silicone source has become a hot spot in the research of ALD method deposition of SiO2. |
Preparation | A method for preparing tris (dimethylamine) silane, which includes the following steps: under the protection of an inert atmosphere, adding dimethylamine and hydrocarbon in the reactor Solvent, and then adding an organolithium compound to the system to obtain a lithium salt of dimethylamine; adding trichlorosilane to the system; distilled after the reaction, tris (dimethylaminoyl) silane is obtained. |